1.需求高效經(jīng)濟(jì)的清洗專用設(shè)備

1. Demand for efficient and economical cleaning specialized equipment

伴隨著超聲波清洗設(shè)備的應(yīng)用范圍拓展，超聲波清洗設(shè)備面對(duì)新科技急需創(chuàng)新。針對(duì)新技術(shù)，新材料，新產(chǎn)品的涌現(xiàn)，設(shè)計(jì)專用超聲波清洗設(shè)備應(yīng)該具有：優(yōu)異的性價(jià)比，與其他清洗方式能高效組合，有一定的自動(dòng)化程度。

With the expansion of the application scope of ultrasonic cleaning equipment, there is an urgent need for innovation in the face of new technologies. In response to the emergence of new technologies, materials, and products, the design of specialized ultrasonic cleaning equipment should have: excellent cost-effectiveness, efficient combination with other cleaning methods, and a certain degree of automation.

2．發(fā)展超聲波碳?xì)湔婵涨逑丛O(shè)備

2. Develop ultrasonic hydrocarbon vacuum cleaning equipment

環(huán)境保護(hù)是我國(guó)的一項(xiàng)基本國(guó)策，清洗行業(yè)以前所沿用的ODS有機(jī)溶劑被禁止，因此，需要研發(fā)使用非ODS溶劑的新型清洗設(shè)備。經(jīng)濟(jì)環(huán)保的碳?xì)淙軇┏暡ㄇ逑丛O(shè)備凸顯其優(yōu)越性能。由于碳?xì)淙軇╅W點(diǎn)低，限制了其在超聲波清洗方面的作用。在引入超聲波碳?xì)湔婵涨逑醇夹g(shù)后，不僅達(dá)到了安全環(huán)保的目的，而且在真空狀態(tài)下進(jìn)行超聲波碳?xì)淝逑催€強(qiáng)化了潔凈功能，大理發(fā)展碳?xì)湔婵涨逑匆殉蔀榻窈蟓h(huán)保型超聲波清洗的發(fā)展方向。

Environmental protection is a fundamental national policy in China, and the use of ODS organic solvents in the cleaning industry has been banned. Therefore, it is necessary to develop new cleaning equipment that uses non ODS solvents. The economic and environmentally friendly hydrocarbon solvent ultrasonic cleaning equipment highlights its superior performance. Due to the low flash point of hydrocarbon solvents, their effectiveness in ultrasonic cleaning is limited. After the introduction of ultrasonic hydrocarbon vacuum cleaning technology, not only has the goal of safety and environmental protection been achieved, but ultrasonic hydrocarbon cleaning under vacuum has also strengthened the cleaning function. The development of hydrocarbon vacuum cleaning in Dali has become the future direction of environmentally friendly ultrasonic cleaning.

3．研發(fā)高頻超聲波清洗設(shè)備

3. Develop high-frequency ultrasonic cleaning equipment

目前工業(yè)上大量使用的為低中頻段的超聲波清洗機(jī)，也即20~50KHZ頻段，而現(xiàn)在急需研發(fā)0~200KHZ高頻以及兆赫級(jí)超聲波清洗設(shè)備。

At present, the widely used ultrasonic cleaning machines in industry are in the low to medium frequency range, which is the 20-50KHZ frequency band. However, there is an urgent need to develop high-frequency and megahertz ultrasonic cleaning equipment in the 0-200KHz range.

兆赫級(jí)超聲波清洗技術(shù)有以下的主要優(yōu)點(diǎn)：一是避免對(duì)器件表面清洗時(shí)帶來(lái)?yè)p傷，而是更加精準(zhǔn)地去除附著在器件表面的亞微米級(jí)的污垢。

The megahertz ultrasonic cleaning technology has the following main advantages: firstly, it avoids damage to the surface of the device during cleaning, and more accurately removes submicron scale dirt attached to the surface of the device.

兆赫級(jí)超聲波清洗設(shè)備目前已經(jīng)存在，產(chǎn)品主要來(lái)自國(guó)外，我國(guó)研制的兆赫級(jí)超聲波清洗設(shè)備還未從實(shí)驗(yàn)室走向工程應(yīng)用。兆赫級(jí)超聲波清洗設(shè)備主要應(yīng)用在半導(dǎo)體生產(chǎn)線，用于對(duì)100~300mm硅片的清洗，既可以出去硅片表面0.15μm的顆粒，又可以組織漂洗過(guò)程中顆粒的重新附著。可見，兆赫級(jí)超聲波清洗設(shè)備已經(jīng)是大規(guī)模集成電路制造生產(chǎn)過(guò)程中必不可少的。

The megahertz level ultrasonic cleaning equipment currently exists, and the products mainly come from abroad. The megahertz level ultrasonic cleaning equipment developed in China has not yet moved from the laboratory to engineering applications. The megahertz level ultrasonic cleaning equipment is mainly used in semiconductor production lines for cleaning 100-300mm silicon wafers. It can remove particles of 0.15 μ m on the surface of the silicon wafer and organize the reattachment of particles during the rinsing process. It can be seen that megahertz level ultrasonic cleaning equipment is essential in the large-scale integrated circuit manufacturing process.

4.開拓超聲波清洗特殊應(yīng)用

4. Explore special applications of ultrasonic cleaning

超聲波清洗通常是對(duì)零部件的清洗，隨著工藝的不斷完善，出現(xiàn)了一些特殊應(yīng)用，如超聲波防垢在線清洗等。超聲波防垢清洗主要是利用超聲波強(qiáng)聲場(chǎng)處理流體，使流體中成垢物質(zhì)在超聲場(chǎng)的作用下，其物理形態(tài)和化學(xué)性能發(fā)生一系列的變化，使之分散、粉碎、松散、松脫而不易附著管、器壁形成積垢。超聲波強(qiáng)聲場(chǎng)處理流體不僅有防垢的作用，而且能加快液體表面?zhèn)鳠崴俾剩岣咭后w的傳熱效率，這些新應(yīng)用的出現(xiàn)更大地發(fā)揮了超聲波清洗的功能，近年來(lái)，雷士超聲波設(shè)備廠在開拓超聲波應(yīng)用新領(lǐng)域方面做出了極大貢獻(xiàn)。

Ultrasonic cleaning is usually used to clean components. With the continuous improvement of the process, some special applications have emerged, such as ultrasonic anti scaling online cleaning. Ultrasonic anti scaling cleaning mainly uses ultrasonic strong sound field to treat fluids, causing a series of changes in the physical form and chemical properties of scaling substances in the fluid under the action of ultrasonic field, making them dispersed, crushed, loose, and less likely to adhere to pipes and walls to form scaling. Ultrasonic strong sound field treatment of fluids not only has anti scaling effect, but also can accelerate the heat transfer rate on the liquid surface and improve the heat transfer efficiency of the liquid. The emergence of these new applications has greatly enhanced the function of ultrasonic cleaning. In recent years, Leishi Ultrasonic Equipment Factory has made great contributions in exploring new fields of ultrasonic applications.

5.超聲波清洗設(shè)備智能化，集成化

5. Intelligent and integrated ultrasonic cleaning equipment

隨著工業(yè)產(chǎn)品向微型化、智能化、壽命長(zhǎng)、高可靠性發(fā)展，在“互聯(lián)網(wǎng)+制造”的大變局中，超聲波清洗技術(shù)也與時(shí)俱進(jìn)，在工業(yè)生產(chǎn)與社會(huì)生活的許多方面，都有它活躍的舞臺(tái)。將各種新型處理器逐漸應(yīng)用到超聲波電源中，使整個(gè)超聲波系統(tǒng)具有優(yōu)良穩(wěn)定性、可靠性，并可集成多種功能，如頻率跟蹤、故障在線檢測(cè)、遠(yuǎn)程控制、組網(wǎng)集中控制等。

With the development of industrial products towards miniaturization, intelligence, long life and high reliability, ultrasonic cleaning technology also keeps pace with the times in the great change of "Internet plus manufacturing". It has an active stage in many aspects of industrial production and social life. Gradually applying various new processors to ultrasonic power supplies, the entire ultrasonic system has excellent stability and reliability, and can integrate multiple functions such as frequency tracking, online fault detection, remote control, and centralized network control.

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